Students

MTRN8062 – Micro Electro Mechanical Systems (MEMS)

2025 – Session 2, In person-scheduled-weekday, North Ryde

General Information

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Unit convenor and teaching staff Unit convenor and teaching staff Unit Convenor and Lecturer
David Inglis
david.inglis@mq.edu.au
Contact via email
3MD-160
Mondays 4-5pm
Credit points Credit points
10
Prerequisites Prerequisites
40cp at 6000 level or above including MTRN6026
Corequisites Corequisites
Co-badged status Co-badged status
Unit description Unit description

This unit provides a comprehensive overview to the realm of Microelectromechanical Systems (MEMS) and their multifaceted applications across various domains, encompassing sensors, actuators, biology, and microfluidics. MEMS, recognized as a highly promising technology, has garnered extensive utility across numerous facets of our daily existence. Sectors such as industry, healthcare, automotive, and aerospace have progressively embraced MEMS devices, leveraging the fusion of microelectronics and micromachining technology for precision-driven control, automation, and positioning purposes. The unit integrates practical experience, offering hands-on exposure to the realm of MEMS. It aims to acclimate students with the intricacies of microfabrication processes, enabling them to engage within the School of Engineering's clean room for fundamental microfabrication activities. Learners will delve into the physics and underlying principles governing MEMS devices, thereby cultivating an enriched understanding of this diverse and impactful field.

Learning in this unit enhances student understanding of global challenges identified by the United Nations Sustainable Development Goals (UNSDGs) Good Health and Well Being; Quality Education; Industry, Innovation and Infrastructure;

Important Academic Dates

Information about important academic dates including deadlines for withdrawing from units are available at https://www.mq.edu.au/study/calendar-of-dates

Learning Outcomes

On successful completion of this unit, you will be able to:

  • ULO1: Explain the underlying mechanisms of various MEMS devices such as sensors, actuators, gyroscopes and microfluidics, and how they operate in different applications.
  • ULO2: Execute a successful analysis of a MEMS problem and provide insights into the practical applications of the methods.
  • ULO3: Perform multiphysics modelling for a MEMS
  • ULO4: Design and fabricate a MEMS system or component using appropriate facilities and applying the theory learned.
  • ULO5: Professionally communicate and collaborate with others by effectively transferring and exchanging knowledge and ideas verbally.
  • ULO6: Synthesise and apply advanced problem-solving techniques that meet the expectations and standards of relevant industry sectors.

General Assessment Information

Grading and passing requirement for unit

In order to pass this unit a student must obtain a mark of 50 or more for the unit (i.e. obtain a passing grade P/ CR/ D/ HD).

Supplementary Exam: If you receive special consideration for the final exam, a supplementary exam will be scheduled by the faculty during a supplementary exam period. This is typically 3 to 4 weeks after the normal exam period. By making a special consideration application for the final exam you are declaring yourself available for a resit during the supplementary examination period and will not be eligible for a second special consideration approval based on pre-existing commitments. Please ensure you are familiar with the policy prior to submitting an application. Approved applicants will receive an individual notification one week prior to the exam with the exact date and time of their supplementary examination.

Late submissions and Resubmissions

Online quizzes, in-class activities, or scheduled tests and exam must be undertaken at the time indicated in the unit guide.  All other assessments must be submitted by 5:00 pm on their due date. Should either of these assessments be missed due to illness or misadventure, students should apply for Special Consideration.

Assessments not submitted by the due date will receive a mark in accordance with the late submission policy as follows:  A 12-hour grace period will be given after which the following deductions will be applied to the awarded assessment mark: 12 to 24 hours late = 10% deduction; for each day thereafter, an additional 10% per day or part thereof will be applied until five days beyond the due date. After this time, a mark of zero (0) will be given. For example, an assessment worth 20% is due 5 pm on 1 January. Student A submits the assessment at 1 pm, 3 January. The assessment received a mark of 15/20. A 20% deduction is then applied to the mark of 15, resulting in the loss of four (4) marks. Student A is then awarded a final mark of 11/20.

Resubmissions of work are not allowed.

Special Consideration

The Special Consideration Policy aims to support students who have been impacted by short-term circumstances or events that are serious, unavoidable and significantly disruptive, and which may affect their performance in assessment. If you experience circumstances or events that affect your ability to complete the assessments in this unit on time, please inform the convenor and submit a Special Consideration request through ask.mq.edu.au.

Assessment Tasks

Name Weighting Hurdle Due
Assignment 30% No Week 13
Final Exam 50% No Exam Period
Skills and knowledge demonstrated during research lab visits 20% No Week 2

Assignment

Assessment Type 1: Modelling task
Indicative Time on Task 2: 2 hours
Due: Week 13
Weighting: 30%

 

One assignment will be used to assess MEMS design and modelling

 
On successful completion you will be able to:
  • Execute a successful analysis of a MEMS problem and provide insights into the practical applications of the methods.
  • Perform multiphysics modelling for a MEMS

Final Exam

Assessment Type 1: Examination
Indicative Time on Task 2: 30 hours
Due: Exam Period
Weighting: 50%

 

The final exam will summatively assess content from the unit. 

 
On successful completion you will be able to:
  • Explain the underlying mechanisms of various MEMS devices such as sensors, actuators, gyroscopes and microfluidics, and how they operate in different applications.
  • Synthesise and apply advanced problem-solving techniques that meet the expectations and standards of relevant industry sectors.

Skills and knowledge demonstrated during research lab visits

Assessment Type 1: Practice-based task
Indicative Time on Task 2: 5 hours
Due: Week 2
Weighting: 20%

 

Students will be assessed on their demonstration of skills, knowledge and applied learning during visits to research laboratories. This may include replicating a task after having it demonstrated, answering questions about the equipment, facility or process, and behavior in a professional manner.

 
On successful completion you will be able to:
  • Design and fabricate a MEMS system or component using appropriate facilities and applying the theory learned.
  • Professionally communicate and collaborate with others by effectively transferring and exchanging knowledge and ideas verbally.

1 If you need help with your assignment, please contact:

  • the academic teaching staff in your unit for guidance in understanding or completing this type of assessment
  • the Writing Centre for academic skills support.

2 Indicative time-on-task is an estimate of the time required for completion of the assessment task and is subject to individual variation

Delivery and Resources

Students are encourage to obtain a copy of "Foundations of MEMS" by Chang Liu. Any edition will be suitable.

"Fundamentals of Microfabrication, The Science of Miniaturization" by Marc J. Madou is also a useful text.

Lecture and SGTAs start in week 1. Practical Classess start in week 3.

Methods of Communication: We will communicate with you via your university email and through announcements on iLearn. Queries to convenors can either be placed on the iLearn discussion board or sent to the unit convenor via the contact email on iLearn.

 

Unit Schedule

Lecture and SGTAs start in week 1. Practical Classess start in week 3.

Policies and Procedures

Macquarie University policies and procedures are accessible from Policy Central (https://policies.mq.edu.au). Students should be aware of the following policies in particular with regard to Learning and Teaching:

Students seeking more policy resources can visit Student Policies (https://students.mq.edu.au/support/study/policies). It is your one-stop-shop for the key policies you need to know about throughout your undergraduate student journey.

To find other policies relating to Teaching and Learning, visit Policy Central (https://policies.mq.edu.au) and use the search tool.

Student Code of Conduct

Macquarie University students have a responsibility to be familiar with the Student Code of Conduct: https://students.mq.edu.au/admin/other-resources/student-conduct

Results

Results published on platform other than eStudent, (eg. iLearn, Coursera etc.) or released directly by your Unit Convenor, are not confirmed as they are subject to final approval by the University. Once approved, final results will be sent to your student email address and will be made available in eStudent. For more information visit connect.mq.edu.au or if you are a Global MBA student contact globalmba.support@mq.edu.au

Academic Integrity

At Macquarie, we believe academic integrity – honesty, respect, trust, responsibility, fairness and courage – is at the core of learning, teaching and research. We recognise that meeting the expectations required to complete your assessments can be challenging. So, we offer you a range of resources and services to help you reach your potential, including free online writing and maths support, academic skills development and wellbeing consultations.

Student Support

Macquarie University provides a range of support services for students. For details, visit http://students.mq.edu.au/support/

Academic Success

Academic Success provides resources to develop your English language proficiency, academic writing, and communication skills.

The Library provides online and face to face support to help you find and use relevant information resources. 

Student Services and Support

Macquarie University offers a range of Student Support Services including:

Student Enquiries

Got a question? Ask us via the Service Connect Portal, or contact Service Connect.

IT Help

For help with University computer systems and technology, visit http://www.mq.edu.au/about_us/offices_and_units/information_technology/help/. 

When using the University's IT, you must adhere to the Acceptable Use of IT Resources Policy. The policy applies to all who connect to the MQ network including students.

Engineers Australia Competency Mapping

EA Competency Standard

Unit Learning Outcomes

Knowledge and Skill Base

1.1 Comprehensive, theory-based understanding of the underpinning fundamentals applicable to the engineering discipline.

1.2

1.2 Conceptual understanding of underpinning maths, analysis, statistics, computing.

 

1.3 In-depth understanding of specialist bodies of knowledge

1,2,3,4

1.4 Discernment of knowledge development and research directions

2

1.5 Knowledge of engineering design practice

4

1.6 Understanding of scope, principles, norms, accountabilities of sustainable engineering practice.

 

Engineering Application Ability

2.1 Application of established engineering methods to complex problem solving

2,3

2.2 Fluent application of engineering techniques, tools and resources.

2,3,4

2.3 Application of systematic engineering synthesis and design processes.

 

2.4 Application of systematic approaches to the conduct and management of engineering projects.

 

Professional and Personal Attributes

3.1 Ethical conduct and professional accountability.

4

3.2 Effective oral and written communication in professional and lay domains.

1,2

3.3 Creative, innovative and pro-active demeanour.

 

3.4 Professional use and management of information.

 

3.5 Orderly management of self, and professional conduct.

4

3.6 Effective team membership and team leadership

 

Unit information based on version 2025.04 of the Handbook